Nanotechnology group
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    • Colloids and Interfaces
    • Quantum Nanosystems & Nonlinear Physics
    • THz and Solar Cells
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FE-SEM with Nanolithography Controller

Home Clean Room of Nanotechnology, Lithography Room FE-SEM with Nanolithography Controller
  • Imaging with InLens and SE2 detectors
  • Nanolithography with a nanometric resolution for the alignment of the ebeam

 

Manuals:

Bakeout

Software Operation Manual

ELPHY Plus Hardware Operation Manual

  • E-beam Evaporator
Nanotechnology group. University of Salamanca.